Mirror Material | Average Roughness Ra, nm |
Sputtering Depth, µm | Sputtering Depth in Relation to the Sputtering Depth of the Mo Sample | ||
---|---|---|---|---|---|
Before | After |
Measured Data Y/Y(Mo) |
Computed Results Y/Y(Mo)* | ||
Mo | 0.5 | 0.7 | 0.12 | 1.0 | 1.0 |
SS | 1.6 | 5.7 | 0.22 | 1.8 | 6.9 |
Cu | 7.0 | 47 | 2.68 | 22.3 | 15.5 |