Metal | Oxide | Thickness δ, nm | Time, h | Removal Efficiency, O at/103 H at | Reference |
---|---|---|---|---|---|
Cu | Cu2O | 150 | 0.02 | ~750 | [79] |
Ni | NiO | 209 | 3 | 7.9 | [79] |
Fe | Fe2O3 | 153 | 5 | 3.3 | [79] |
Mo | MxOy | ~100* | 6 | ~3* | [79] |
Ti | TiO2 | 177 | 15 | 2.0 | [79] |
Be | BeO | ~17 | 1.5 | ~1 | [43] |
Al | Al2O3 | ~8 | ~0.5 | [46] | |
W | WO3 | ~10 | 2.0 | ~0.5 | [48] |
Zr | ZrO2 | ~14 | 30 | ~0.15** | [80] |
Zr | ZrO2 | ~14 | 30 | ~0.7*** | [80] |